JPH0322064U - - Google Patents

Info

Publication number
JPH0322064U
JPH0322064U JP8076089U JP8076089U JPH0322064U JP H0322064 U JPH0322064 U JP H0322064U JP 8076089 U JP8076089 U JP 8076089U JP 8076089 U JP8076089 U JP 8076089U JP H0322064 U JPH0322064 U JP H0322064U
Authority
JP
Japan
Prior art keywords
substrate
substrate holder
thin film
holder
plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8076089U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8076089U priority Critical patent/JPH0322064U/ja
Publication of JPH0322064U publication Critical patent/JPH0322064U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP8076089U 1989-07-11 1989-07-11 Pending JPH0322064U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8076089U JPH0322064U (en]) 1989-07-11 1989-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8076089U JPH0322064U (en]) 1989-07-11 1989-07-11

Publications (1)

Publication Number Publication Date
JPH0322064U true JPH0322064U (en]) 1991-03-06

Family

ID=31626099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8076089U Pending JPH0322064U (en]) 1989-07-11 1989-07-11

Country Status (1)

Country Link
JP (1) JPH0322064U (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001338878A (ja) * 2000-03-21 2001-12-07 Sharp Corp サセプタおよび表面処理方法
JP2012140681A (ja) * 2010-12-28 2012-07-26 Sharp Corp ヤトイ治具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320461A (ja) * 1986-07-14 1988-01-28 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JPS63219568A (ja) * 1987-03-10 1988-09-13 Matsushita Electric Ind Co Ltd 透明導電膜の形成方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6320461A (ja) * 1986-07-14 1988-01-28 Nippon Telegr & Teleph Corp <Ntt> 薄膜形成装置
JPS63219568A (ja) * 1987-03-10 1988-09-13 Matsushita Electric Ind Co Ltd 透明導電膜の形成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001338878A (ja) * 2000-03-21 2001-12-07 Sharp Corp サセプタおよび表面処理方法
JP2012140681A (ja) * 2010-12-28 2012-07-26 Sharp Corp ヤトイ治具

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